An accurate and reasonable energy efficiency analysis is significant to the scale-up development of carbon capture technology. It is not only a preliminary preparation to the final energy-saving proposal of carbon capture technology, but also an important data basis to sustainable performance evaluation of carbon capture process with aims on green, clean and low-carbon. Therefore, in addition to exploring the mechanism on energy conversion of carbon capture process, it is urgent to establish a benchmarking analysis methodology of energy efficiency performance which features on easy-to-operate for the demand of engineering sector, so that the performance cognition of typical capture technologies could be accumulated and compared on a reasonable and unified evaluation platform. Based on the benchmarking analysis method, the methodology of energy efficiency performance on temperature swing adsorption (TSA) is presented, including processes, parameters, model, etc. The effect of adsorption temperature and desorption temperature on the energy efficiency performance of TSA was analyzed, the feasibility of proposed method is demonstrated and quantified, and the influence of boundary changes on the evaluation results was discussed as well. The proposed method could provide a generalized guidance to the benchmarking evaluation of energy efficiency performance of carbon capture with specific case.