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Research Paper

Research on recovery process and kinetics of gallium and indium from MOCVD production waste

  • RAO Fu ,
  • ZHENG Xiao-Hong ,
  • ZHANG Xi-Hua ,
  • TAO Tian-Yi ,
  • CAO Hong-Bin ,
  • CAO Hong-Bin Wei-Guang ,
  • SUN Zhi
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  • 1. Beijing Engineering Research Center of Process Pollution Control, Key Laboratory of Green Process and Engineering, Division of Environment Technology and Engineering, Institute of Process Engineering, Chinese Academy of Sciences, Beijing 100190, China 2. WEEE Research Center, Research Center of Resource Recycling Science and Engineering, Shanghai Polytechnic University, Shanghai Collaborative Innovation Center for WEEE Recycling, Shanghai 201209, China 3. Beijing Key Laboratory of Materials Utilization of Nonmetallic Minerals and Solid Wastes, National Laboratory of Mineral Materials, School of Materials Science and Technology, China University of Geosciences (Beijing), Beijing 100083, China

Received date: 2021-03-14

  Revised date: 2021-06-03

  Online published: 2022-05-27

Abstract

In recent years, LED has been widely used in various lighting fields because of its energy-saving and environment-friendly characteristics. As a key part of LED products, epitaxial wafers are produced by metal-organic vapor deposition (MOCVD). With the rapid development of the LED industry, green and clean recycling of MOCVD production waste has attracted much attention. In this study, the leaching behavior and kinetics of Ga and In elements from MOCVD production waste were studied with sulfuric acid as a leaching agent. The effects of different types of leaching agents, H2SO4 concentration, solid-liquid ratio, leaching temperature and leaching time on the leaching efficiencies of Ga and In were systemically investigated. It was found that the leaching efficiencies of Ga and In can reach 67.50% and 91.46% under the optimal conditions of H2SO4 concentration of 3 mol/L, the solid-liquid ratio of 50 g/L, the temperature of 80℃, and the reaction of 120 min. The kinetics study showed that the leaching kinetics of Ga and In in the temperature range of 293.15~333.15 K was by the shrinkage core model, and the leaching process was controlled by surface chemical reaction and external diffusion mixing. At the same time, the results of XRD and SEM-EDS also confirmed the agreement with the shrinkage kernel model. The activation energies of Ga and In are 25.7 and 21.7 kJ/mol, respectively, when the leaching temperature was ranged from 293.15 K to 333.15 K. Based on the kinetics behavior of Ga and In leaching, the feasibility of enhanced roasting-acid leaching process was proposed and verified. It was found that the leaching efficiencies of Ga and In can be increased from 67.50% and 91.46% to 88.27% and 98.32%, respectively, under the enhanced roasting-acid leaching process. And gallium oxide byproducts were obtained. The findings from this research are expected to provide technical support and alternative for industrial recycling of critical metals from MOCVD production waste.

Key words: MOCVD; leaching; gallium; indium; kinetics

Cite this article

RAO Fu , ZHENG Xiao-Hong , ZHANG Xi-Hua , TAO Tian-Yi , CAO Hong-Bin , CAO Hong-Bin Wei-Guang , SUN Zhi . Research on recovery process and kinetics of gallium and indium from MOCVD production waste[J]. The Chinese Journal of Process Engineering, 2022 , 22(5) : 689 -698 . DOI: 10.12034/j.issn.1009-606X.221085

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