With the development of electronics and the continuous progress of micromanufacturing technology, micro-scale distillation technology as an effective means of chemical enhancement is used to solve the problems existing in the distillation process such as large size, low energy utilization efficiency, difficult to separate the systems with low relative volatility. When the scale is reduced, the depth of liquid channel and the mass transfer distance are also reduced, and the mass transfer efficiency between gas-liquid or liquid-liquid is enhanced significantly. The fractionation by use of micro-distillation equipment has a very low height equivalent to a theoretical plate. At the same time, the heat transfer can be more accurately controlled under the premise of an excellent temperature control system, which is conducive to reducing the occurrence of side reactions for the thermal sensitive system. In this work, five main micro-distillation methods, including gravity micro-distillation, carrier gas micro-distillation, vacuum micro-distillation, capillary force micro-distillation and centrifugal force micro-distillation, were introduced. Their structural characteristics, advantages and disadvantages were compared and discussed, and the manufacturing technology of micro-distillation equipment was systematically introduced. Micro-scale distillation technology has special advantages, which can provide a new idea for the development of modern chemical rectification towards the goal of consumption reduction, environmental protection and intensification.