通过X射线衍射仪、X射线荧光光谱分析仪、傅里叶变换红外光谱仪分析了金刚线切割多晶硅废料的组分及其体系中存在的硅氧化物，研究了铝与切割废料合金化过程中可能存在的化学反应过程，采用HSC Chemistry 6.0软件对其反应体系进行了热力学分析，利用差热分析法研究了铝热还原切割废料中SiO2的动力学过程，对金刚线切割多晶硅废料进行了掺铝制备铝硅合金的实验研究。结果表明，金刚线切割多晶硅废料和铝粒按不同铝硅摩尔比兑掺后，在电磁搅拌的作用下，合金化的温度范围为800~1600℃，铝热反应可将废料中少量的SiO2杂质还原成单质Si，铝热还原二氧化硅的活化能为364.1 kJ/mol，反应级数为0.91，实验样品的EPMA和XRD等表征结果表明合金成分和渣相与热力学分析完全吻合，合金化效果明显。

The diamond wire saw powder composition and its silicon oxides were analyzed by X-ray diffraction analysis (XRD), X-ray fluorescence spectrum analyzer (XRF) and Fourier transform infrared spectrometer (FT-IR). The possible reaction process for alloying between aluminum and diamond wire saw powder was analyzed, and its thermodynamics were determined by HSC Chemistry 6.0 software. The kinetics process of aluminum thermal reduction of SiO2 was discussed, and the Al?Si alloy preparation by using diamond wire saw powder with aluminum was experimentally investigated. The results showed that the diamond wire saw powder melted with aluminum in different mole proportion during the alloying process at the temperature range of 800~1600℃ with the influence of electromagnetic stirring. Meantime, SiO2 impurities can be reduced to Si during aluminum thermal reduction. The apparent activation energy was 364.1 kJ/mol, while the reaction order was 0.91. Finally, phase composition of alloy and slag were analyzed by EPMA, XRD, and the results were in agreement with the thermodynamic and kinetic analysis. This work provided a new idea for effectively solving the problem of silicon waste recovery and utilization during the photovoltaic industry.